Desktop integrated equipment
Process environment: nitrogen protection
3.5-inch resistive touch screen
Chamber lid open and close: automatic and manual (optional)
Observation window: glass window §æ70mm
Specification£º
Maximum vacuum: 8¡Á10-2mbar
Heated area: 200mm¡Á200mm
Clearance above heating plate£º50mm
Maximum temperature:450¡æ
Control accuracy: +/- 1¡æ
Temperature uniformity£º+/- 1.5 % from the set temperature, within 180mm area
The resistance heater is embedded in the heating plate, maximum effective power is 3KW, adopts area heating method.
Temperature measurement: one temperature sensor inside the machine for system temperature measurement; one temperature probe for operator to do debugging